水冷式晶片溫控水槽規格表
可搭配各製程僅有侷限空間但需要降溫系統的設備中
Thermotank – T Series
●無壓縮機，節能省電
●均溫與控溫穩定性佳
●客製化水槽尺寸
| MODEL | T010 | T020 | T042 | T044 | T065 | T084 | T130 | |
|---|---|---|---|---|---|---|---|---|
| Tank Capacity(L) | 10L | 20L | 42L | 44L | 65L | 84L | 130L | |
| Overall Size (W*D*H mm) | W | 260 | 350 | 350 | 350 | 550 | 650 | 900 |
| D | 370 | 510 | 510 | 640 | 450 | 500 | 500 | |
| H | 400 | 400 | 550 | 450 | 600 | 500 | 550 | |
| Tank Size (W*D*H mm) | W | 210 | 300 | 300 | 300 | 500 | 600 | 850 |
| D | 210 | 350 | 350 | 490 | 300 | 350 | 350 | |
| H | 250 | 250 | 400 | 300 | 450 | 400 | 450 | |
| Temp. Control Method | Thermoelectric Cooling | |||||||
| Temp. Sensor | PT100 PID W/tuning | |||||||
| Cooling Method | Water Cooling | |||||||
| Ambient Temp. and humidity | 15~35 °C / 35~80% RH (No condensation) | |||||||
| Facility water Temp. | 10~35 °C | |||||||
| Operating Temp. Range | 0~50 °C | |||||||
| Temp. Stability | ±0.1 °C | |||||||
| Power Supply | 1Φ 100V~240 VAC / 50~60Hz | |||||||
| Power Comsuption (KW) | 0.4 | 0.6 | 0.9 | 0.9 | 1.2 | 1.2 | 2.3 | |
| Communcation (Option) | Analog (4-20mA) / (0-10V) / (RS232/RS485) | |||||||
| Extra function (Option) | Hi/Lo Level / Water Flow / Alarm Output | |||||||